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Mask Evaluation
AIMS™ 45-193i
AIMS™ 32-193i

Mask Repair/ Tuning
MeRiT® HR 32
MeRiT® MG 45
CDC200™

Mask Metrology
Phame®
WLCD32

Mask Processing
Pellicle Removal System

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AIMS™ 32-193i launched at Photomask Conference, Monterey/CA for advanced mask qualification at the 32nm node
Carl Zeiss SMT Now Exclusive Global Distributor of the HAP Pellicle Removal Tool
More customers like ZEISS mask metrology system
BACUS Newsletter, Feb. 2009, see page 8
PROVE™ System Prevails in Photomask Registration and Overlay: Next Order from Samsung Electronics
이벤트
BACUS 2010
MeRiT HR32
AIMS 32-193i