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ORIONŽ PLUS – Spectra
Backscatter Spectroscopy for the Helium Ion Microscope |
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The Award-winning ORIONŽ PLUS Helium Ion Microscope is a high resolution imaging instrument that offers superb surface detail, and a variety of unique and useful contrast mechanisms.
The newly developed Spectra detector option adds structural and compositional analysis to the capabilities of the helium ion microscope, in the form of energy spectroscopy of the helium backscattered from the sample. The technique is similar to other ion scattering techniques such as RBS, ISS, LEIS and MEIS. The unique combination of ion scattering spectroscopy and sub-nanometer resolution microscopy opens the door to new, so far unexplored applications in material's analysis and process control.
The center-piece of the SpectraŽ detection package is a solid-state detector optimized for the detection of backscattered helium. Also included are data-processing electronics, data-communication electronics, a separate data-acquisition PC, and all necessary mechanical, electrical and software interfaces to allow seamless integration with the ORIONŽ PLUS Helium Ion Microscope.
Materials Analysis Application:
The Spectra detector can perform elemental analysis on bulk material and also offers the possibility of analyzing small particles and volumes which are challenging to EDS on SEM.
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