ZEISS GeminiSEM

일반적인 작업 타입 및 어플리케이션

• 나노 전자 및 Photonic 장비 구조, integrity 및 불량 시각화
• 주요 빔 손상, 차징 효과 또는 이미지 왜곡을 피하면서 2D 재료와 같은 민감한 샘플을 이미징
• 고해상도에서 나노 메카닉 및 나노 역학 연구, 재료의 표면 지형 특성화 및 원소 조성 분석
• 나노 유체 실험을 위한 장비의 품질 생성 및 평가

Typical Tasks and Applications

• Microstructure and device evaluation
• Defect analysis
• Phase distribution
• Pore and crack quantification

일반적인 작업 유형 및 어플리케이션

• 우수한 대비 및 선명도를 가진 sub-nm 해상도에서 다양한 재료 특성화
• 금속 조직학 및 Metallography and fracture analysis
• Characterization of in situ material behavior under varying conditions
• Generation of experimental data for validation and improved fidelity of simulation models.
  

A stainless-steel sample imaged under in situ tensile load test
Using the AsB detector, images have extremely high contrast and capture the slip bands formation during in situ loading as shown in the images of before (left) and after loading (right).

Cross-sectional image of stainless-steel surface after surface preparation using sand blasting.
The crushed SiO₂ shows positive charging on the left image. Contrast visible only at large working distance of 5 mm (left) versus a closer working distance of 1 mm (right).

Cross-section of Al₂O₃/ZrO₂-3mol%Y₂O₃ nanocomposite powder
Imaged with the BSE detector at 1 kV landing energy with no bias (left) and at 1 kV landing energy with 5 kV bias (right), providing enhanced material contrast and sharpness.

Typical Tasks and Applications

• Surface characterization and evaluation
• Structural analysis, segmentation and quantification
• Correlative multiscale characterization due to typical hierarchical structure of some bio- materials
• Failure analysis and process control
  

Typical Tasks and Applications

• Failure analysis on mechanical, optical or electronic components
• Fracture analysis and metallography
• Surface, microstructure and device characterization
• Compositional and phase distribution
• Impurity and inclusion determination
  

Typical Tasks and Applications

• Construction analysis and benchmarking
• Passive voltage contrast
• Subsurface analysis
• Electronic property measurement with probing
• TEM site selection
  

The electronic properties of passive voltage contrast can be compared to subsurface structural information by increasing the beam landing energy, in this case using 1 kV for PVC (left) and 3 kV for the subsurface imaging (right). The superb stability of the Gemini column enables a seamless workflow.

Probing during imaging can give further insight into function. Here, electron beam absorbed current (EBAC) shows the connectivity of a circuit with a probe tip landed at one node (first).
EBAC at increasing tensions (first and second: 2 kV, third: 5 kV, fourth: 8 kV) shows the electronic structure at lower metal layers.

Typical Tasks and Applications

• Characterization of topology
• Imaging sensitive, non-conductive, outgassing, or low contrast samples
• Visualizing the ultrastructure of cells, tissues etc. at high resolutions
• Imaging very large areas such as serial sections or block faces
  

Tissue, cells or viruses & STEM imaging: SARS-CoV-2 grown in a tissue culture and inactivated by chemical fixation. The virus was negatively stained.
Imaged with GeminiSEM 560, aSTEM, false colored.
Sample: courtesy of M. Hannah, Public Health England, UK.

Life sciences often deal with low contrast samples and correlative experiments are challenging when essential features lack contrast. With Tandem decel you can introduce an electrical deceleration or bias between the sample and objective lens and achieve a dramatic increase in contrast. Imaged with GeminiSEM 560.